|
Ph.D. Students Graduated:
| 1. | Green, Gerald W. | 1/1992 |
| ![]() Ph.D. thesis: | "Vibration Analysis of Cylinder Liners in the
Consideration of Cavitation" |
|
| 2. | Lee, Yung-Ming | 5/1994 |
| ![]() Ph.D. thesis: | "Nonlinear Vibration and Stability of a Beam
Subjected to Planar Excitations" |
|
| 3. | Chen, Hector T. H. | 12/1994 |
| ![]() Ph.D. thesis: | "The Effects of Synchrotron Radiation on the Mechanical
Properties of X-ray Lithography Mask Membranes" |
|
| 4. | Skrobis, Ken J. | 6/1995 |
| ![]() Co-Advisor: | Prof. James Taylor, Materials Science |
| ![]() Ph.D. thesis: | "Bond Mechanisms and Bond Strengths of Solvent-
Welded Polymethylmethacrylate Sheets for Use
as Deep X-ray Resist in LIGA-Type Processing" |
|
| 5. | Kim, Hyungnam | 8/1995 |
| ![]() Ph.D. thesis: | The Analysis of Free-Edge Effects of a Bilayered
Structure Due to Phase Change and Variable
Temperature Distribution" |
|
| 6. | Laird, Daniel L. | 1/1996 |
| ![]() Ph.D. thesis: | "Mechanical Analysis of In-Plane Distortions in
Patterned Thin Films" |
|
| 7. | Laudon, Matthew F. | 1/1996 |
| ![]() Ph.D. thesis: | "Impact of Fabrication Process on Patterned
Thin-Film Mechanical Distortions" |
|
| 8. | Fisher, Adam H. | 5/1998 |
| ![]() Ph.D. thesis: | “Analysis and Simulation of Pattern Placement Errors
in Advanced Lithographic Masks” |
|
| 9. | Cousseau, Peter L. | 5/1998 |
| ![]() Ph.D. thesis: | “Vibration of Perforated Cylindrical Shells” |
|
| 10. | Semke, William H. | 5/1999 |
| ![]() Ph.D. thesis: | “Dynamic Analysis of Advanced Lithographic Masks” |
|
| 11. | Dicks, Gerald A. | 5/2000 |
| ![]() Ph.D. thesis: | “Mechanical Modeling of SCALPEL Masks” |
|
| 12. | Schlax, Michael P. | 10/2000 |
| ![]() Ph.D thesis: | "Characterization of Thin Films for Advanced
Lithographic Membranes" |
|
| 13. | Reu, Phil | 11/2001 |
| ![]() Ph.D. thesis topic: | "Mechanical Modeling of the PREVAIL System" |
|
| 14. | Cotte, Eric P. | 12/2001 |
| ![]() Ph.D. thesis topic: | "Mechanical Modeling of Pellicles" |
|
| 15. | Tang, Ning | 2/2003 |
| ![]() Ph.D. thesis topic: | "Mapping of Localized Stress in Thin Films
Using AFM Measurements" |
M.S. Students Graduated:
| 16. | Uicker, John J., III | 5/1990 |
| ![]() M.S. thesis: | "On the Symmetric Axis of a General Polygon" |
|
| 17. | Lenius, Philip E. | 6/1990 |
| ![]() M.S. thesis: | "Mechanical Response of an X-ray Lithography
Mask Support Structure" |
|
| 18. | Powers, John W. | 1/1991 |
| ![]() M.S. thesis: | "Structural and Fatigue Analysis of the Sandia
Laboratory Microfusion Reactor Chamber" |
|
| 19. | Chan, Mew-Soon | 8/1991 |
| ![]() M.S. thesis: | "Dynamic Analysis of a Variable Mass Space Tether System" |
|
| 20. | Brantmeyer, Mark | 12/1992 |
| ![]() M.S. project: | "Heat Transfer Modelling in Micromechanical Structures" |
|
| 21. | Chen, Jungpin | 12/1992 |
| ![]() M.S. project: | "Mechanical Modelling of the Bonding Process
Used in X-ray Lithography Masks" |
|
| 22. | Haytcher, Eric A. | 12/1992 |
| ![]() M.S. project: | "Thermal Distortions During Exposure of an X-ray Mask" |
|
| 23. | Laudon, Matthew F. | 8/1993 |
| ![]() M.S. thesis: | "Investigations of X-ray Lithography Mask Geometries
and Mounting Techniques for a National X-ray
Mask Standard" |
|
| 24. | Adler, Doug P. | 8/1993 |
| ![]() M.S. thesis: | "The Effect of End Conditions on the Axisymmetric
Vibrations of Cylindrical Shells" |
|
| 25. | Tan, Yew K. | 12/1994 |
| ![]() M.S. thesis | "Investigations of X-ray Lithography Windows" |
|
| 26. | Ertl, Steve J. | 12/1994 |
| ![]() M.S. project: | "Dynamic Response of the JUPITER Reaction Chamber" |
|
| 27. | Nin, Carol N. | 5/1996 |
| ![]() M.S. project: | "The Super LOKI Metro Rocket" |
|
| 28. | Kaap, Dustin L. | 8/1997 |
| ![]() M.S. thesis: | "Dynamic Effective Elastic Constants for Perforated Plates
with Square or Triangular Penetration Patterns" |
|
| 29. | Schlax, Michael P. | 12/1997 |
| ![]() M.S. thesis: | "Impact of Fabrication Process on Patterned Thin-Film
Mechanical Distortions" |
|
| 30. | Tejeda, Richard O. | 12/1998 |
| ![]() M.S. thesis | "Analysis, Design, and Optimization of Ion-Beam Lithography Masks" |
|
| 31. | Mikkelson, Andrew R. | 12/1999 |
| ![]() M.S. thesis: | "Mechanical Distortions in Optical Reticles" |
|
| 32. | Cotte, Eric P. | 5/2000 |
| ![]() M.S. thesis: | "Modeling Mechanical Distortions in X-ray Masks" |
|
| 33. | Risius, Eric A. | 5/2000 |
| ![]() M.S. thesis: | "Analysis and Optimization of Attenuated Phase-Shifting
Lithography Masks" |
|
| 34. | Siewert, Lowell K. | 5/2000 |
| ![]() M.S. thesis | "Experimental Determination of Thin Film Stresses
in Optical Reticles" |
|
| 35. | Weisbrod, Eric J. | 2001 |
| ![]() M.S. topic: | "Inter- and Intra-Membrane Resist Critical Dimension Uniformity Across a
Scalpel Mask" |
|
| 36. | MacDonald, J. Scott | 2001 |
| ![]() M.S. topic: | "Mapping Stresses in Thin Film Pellicles Due to Humidity and
Temperature Change" |
|
| 37. | Wei, Alexander | 2001 |
| ![]() M.S. topic: | "Localized Resist Heating Due to Electron-Beam Patterning During
Photomask Fabrication" |
B.S. Thesis Students Graduated:
| 38. | Sprague, Michael A. | 5/1997 |
| ![]() B.S. thesis: | "The Vibration of Perforated Hemispherical Shells" |
|
| 39. | Richard, Owen T. | 5/1999 |
| ![]() B.S. thesis: | " Fabrication Distortions in X-ray Mesa Masks” |
|
| 40. | Silver, Mark J. | 5/1999 |
| ![]() B.S. thesis: | "Equivalent Dynamic Modeling of Perforated Membranes” |
|
| 41. | Weisbrod, Eric | 12/1999 |
| ![]() B.S. thesis topic: | "The Design and Analysis of a Vibratory Cleaning
Process for Advanced Optical Reticles" |
Special Students Thesis:
| 42. | Samaniago, Ramon | 2000 |
| ![]() Thesis topic: | "Mechanical Properties of Thin Film using the Preassure Bulge test with Laser
Profilometry" |
|
| 43. | Matesanz, Oscar | 2002 |
| ![]() Thesis topic: | "Predicting CD Uniformity in Advanced Lithographic Masks" |
Ph.D. Students in Progress:
| 1. | Chien, Chi-Min |
| ![]() Co-Advisor: | Prof. A. Seireg |
| ![]() Ph.D. thesis topic: | "Investigation of Coupled, Nonlinear Multiple Degree
of Freedom Systems" |
|
| 2. | Lee, Po-Tung |
| ![]() Ph.D. thesis topic: | "Thermomechanical Distortions of PREVAIL Mask
Systems During Exposure" |
|
| 3. | Chang, Jaehyuk |
| ![]() Ph.D. thesis topic: | "Thermomechanical response of the device wafer in Next Generation
Lithography" |
|
| 4. | Sohn, Jaewoong |
| ![]() Ph.D. thesis topic: | "Thermomechanical Analysis for Mask System During
Electron-Beam Patterning Process" |
|
| 5. | Lee, Jae-Won |
| ![]() Ph.D. topic: | "Mechanical Modeling of Resist Collapse” |
|
| 6. | Wei, Alex |
| ![]() Ph.D. topic: | Immersion Lithography |
|
| 7. | Abdo, Amr |
| ![]() Ph.D. topic: | Experimental and Numerical Investigation of the Thermomechanical
Response of Reticles during the Optical Lithography Process |
|
| 8. | Zheng, Liang |
| ![]() Ph.D. topic: | Step and Flash Imprint Lithography |
|
| 9. | Stradins, Lin |
| ![]() Ph.D. topic: | "Modeling Squeeze Film And Added Mass Effects On Membrane Vibrations" |
M.S. Students in Progress:
| 10. | Chalekian, Aaron |
| ![]() M.S. topic: | "Fracture Strength of Membranes used in EPL Masks" |
|
| 11. | Cash, Michael |
| ![]() M.S. topic: | "Resonant Frequency Test of 8 in. EPL Masks" |
|
