CMC

Review Notes for September 7, 2000 


Overview

Prof. Roxann Engelstad


 


 
 
 

Optical Mask Modeling Update

 

Amr Abdo

Experimental Model Verification of the Thermomechanical Response of Optical Reticles
 
 

 

SCALPEL Mask Modeling Update

 

Cheng-fu Chen

Design of Experiment for Optimization of the SCALPEL Mask

 

Jaehyuk Chang

Thermomechanical Global Response of the SCALPEL Mask due to E-Beam Patterning

 

 
 


Questions, Comments? email: dmrumpf@students.wisc.edu