Review Notes for November 2,
2000
Overview
Prof.
Roxann Engelstad
Optical Mask Modeling Update
Phil Reu
Mechanical Analysis of
Fused Silica Pellicles
EPL Modeling Update
Anton Jachim
Mechanical Modeling
of (110) EPL Masks
Cross Cutting Issues
Eric Cotte
Pattern
Transfer in EPL Masks
Questions,
Comments? email: dmrumpf@students.wisc.edu