Anton
Jachim
Orthotropic
Material Properties of Single Crystal Silicon
Anton
Jachim
Motorola
200 mm SCALPEL Mask Image Placement Structural Modeling
Michael Schlax
Experimental
Determination of Thin Film Stresses
Eric
Weisbrod
Experimental
Verification of the Photomask Dynamic Model
Questions, Comments? email:
dmrumpf@students.wisc.edu