CMC

Review Notes for May 6, 1999 

Overview

Prof. Roxann Engelstad

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Adobe pdf format

 

Stencil Mask Modeling Update

Po-Tung Lee
Thermomechanical Distortions of Ion Beam Stencil Masks During Exposure

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Adobe pdf format


 
 

SCALPEL Mask Modeling Update

Gerald Dicks
Mask Fabrication, Pattern Transfer and Mounting Distortions

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Adobe pdf format

Will Semke
PLASMAX Particle Removal Process, SCALPEL Mask Application

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Adobe pdf format

 

Questions, Comments? email: dmrumpf@students.wisc.edu