CMC

Review Notes for March 4, 1999 


Overview

Prof. Roxann Engelstad

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Adobe pdf format

Mark Mason
UW/IST Interaction 1999 Plans

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Adobe pdf format


 
 

SCALPEL Mask Modeling Update

Will Semke
Modal Analyses of the SCALPEL Mask

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Adobe pdf format


 
 

Optical Mask Modeling Update

Andy Mikkelson
Mask Fabrication, Pattern Transfer, and Exposure Mounting

0|1|2|3|4|5|6|7|8|9|10|11|12|13|14|15
Adobe pdf format

 

Stencil Mask Modeling Update

Rick Tejeda

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Adobe pdf format

 

EUV Mask Modeling Star-Up

Rick Tejeda
Stencil Mask Modeling

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Adobe pdf format

 


Questions, Comments? email: dmrumpf@students.wisc.edu