CMC

Review Notes for March 9, 2000 


Overview

Prof. Roxann Engelstad


 



 
 
 
 

X-ray Mask Modeling

Eric Cotte and Michael Schlax
Bonding Experiments
 

 


 

Stencil Mask Modeling

Gary Frisque
Pattern Transfer Studies

 


 
 

Optical Mask Modeling

Amr Abdo
Equivalent Thermal Modeling
 
 

Lowell Siewert and Andy Mikkelson
Chrome Stress and Pattern Transfer
 
 


 
 
 


Questions, Comments? email: dmrumpf@students.wisc.edu