CMC

Review Notes for July 1, 1999 


Overview

Prof. Roxann Engelstad


 

 

Stencil Mask Modeling Update

 

Mark Silver
Equivalent Dynamic Modeling of Perforated Members
 
 

 

 

EUV and Optical Mask Modeling Update

 

Andy Mikkelson
Comparison of Mask Fabrication, Pattern Transfer and Mounting

 

 

Dr. Byungkyu Kim
Finite Element Analysis of SCALPEL Wafer Heating
 


 
 
 
 


Questions, Comments? email: dmrumpf@students.wisc.edu