CMC

Review Notes for February 3, 2000 


Overview

Prof. Roxann Engelstad


 



 
 
 
 

Optical Mask Modeling

Lowell Siewert
Pellicle Studies
 

 

Eric Risius
Phase-Shifting Masks
 
 

 
 

SCALPEL Mask Modeling

Gerald Dicks
Model Verification
 
 

Will Semke
Modal Analysis
 
 


 
 

Stress Characterization

Ning Tang
Measuring Localized Stresses
 
 


 


Questions, Comments? email: eweisbro@cae.wisc.edu