Lowell Siewert, Eric Risius,
and Andy Mikkelson
Assessment
of Pellicle Mechanical Characteristics
Jaewoong Sohn
Simulating
E-Beam Patterning of CaF2 Substrates
Eric Risius
Mechanical
Modeling of Attenuating Phase-Shift Masks
Phil Reu
Stress
Gradient Effects on Mask Fabrication
Gary Frisque
Modeling
Pattern Transfer in Perforated Membranes
Questions, Comments? email:
dmrumpf@students.wisc.edu