Review Notes for August 6, 1998
Prof. Roxann Engelstad
Introduction
1|2
Gerald Dicks
SCALPEL Modeling Update, Pattern Transfer
0|1|2|3|4|5|6
Adobe Acrobat PDF File (2.6
MB)
Owen Richard
X-ray Mask Modeling Update, An Alternative Mask
Design
1|2|3|4|5|6
Rick Tejeda
Stencil Modeling Update, Mask Modeling SOI Fabrication
1|2|3|4|5|6|7|8|9|10|11|12|13|14|15|16
Lowell Siewert
Optical Mask Modeling Update, Experimental Determination
of Layer Stresses
1|2|3|4|5|6
Questions, Comments? email:
dmrumpf@students.wisc.edu